It is easy to use for the automation of analyzing processes.
The overall efficiency of analysis increases with shortened time for analysis.
The buffer zone keeps the process zone vacuum all the time, so the inflow of dirty gas from outside is minimized and the precision of analysis becomes maximized.
Keeping the process zone vacuum delays the aging of heater components more than before, so it is good for cost reduction.
The automation of analysis processes maximizes the utility of time of testing manpower.
Minimizing the contact of samples for analysis to the outside minimizes contamination.
The increase of analysis efficiency actualizes the dedtion of faultiness in advance, so it is possible to test the processes.