Fs8001/fs8003 Mems Mass Flow Sensors

FS8000 Series Gas Flow Sensors Description
The FS8000 mass Flow sensors are designed and manufactured using MEMS flow sensor and package technology.

The FS8000 mass Flow sensors are developed preliminarily for die-attachment equipment air flow path control during pick and placement, and possibly for other instrumentation applications.

The packaging enclosure id made of the chemically inert and thermally stable polyphenylene sulfite (PPS,FS8001) or polycarbonate (PC, FS8003) material.

The FS8000 requires a power supply of 8~24 Vdc, and provides an analog output of 0.5~4.5 Vdc corresponding to the flow rate from 0 to full scale.

FS8000 Series Gas Flow Sensors Features
- Fast response time
- High sensitivity
- Low pressure drop
- Miniature design for easy installation

FS8000 Series Gas Flow Sensors Specifications
* Flow Range
FS8001: (0~500) sccm
FS8003:(0~6) SLPM
* Accuracy: ± (2+0.5FS)%
* Repeatability: ± 1.0%FS
* Output: Non-linear, Analog voltage/I2C
* Analog Output Range: 0.5 ~ 4.5Vdc
* Null Shift: < 30mVdc
* Output Shift: < ±0.12%/'C
* Response Time: 5ms
* Power Supply: 8 ~ 24 Vdc, 50 mA
* Operating Current: 17mA
* Max. Working pressure: 0.5MPa
* Working Temperature: 0 ~ +55'C
* Storage Temperature: -20 ~ +65'C
* Humidity: < 95 %RH (No icing or condensation)