Wafer real - time measuring diagnosis technology development is based on various academicfoundation and highest level technology, and especially, it requires the integration of fusion technology and advanced cutting edge convergence technology such as advanced vacuum technology, impurities measuring diagnosis, extremely pure environment maintenance, process control, mapping and so on.
Outside of that, the TDS device manufacture for special purpose, it provides qualitative and quantitative analysis test report according to the analysis request from external institutions.
- Complex TDS
- SRM in distance, sample in large chamber TDS
- Varied sample features, user specified TDS in demand
