Optical Coating Machine Vacuum Equipment For Coating Telescope Mirror Working principle:ZZS series vacuum coating machine adopt electron gun bombardment materials evaporation technology for work-piece coating ,in order to change workpiece surface performance and get required coating products. Equipment structure: Features: Fully integrated in the machine control platform. Fully automated coating process and control. High speed coating process. Stable productivity and uniformity Easy job and process set-up and maintenance. User-friendly control software. Specification Model ZZS1120 Optical Coating Machine Dimension Substrate dome Size Vacuum chamber Structure Cabinet type single door , 304 stainless steel material Ultimate vacuum 3¡Á10-4Pa Restore vacuum 4¡Á10-3Pa,¡Ü12 minutes Vacuum pumping system Mechanical pump+ roots pump +diffusion pump Substrate dome structure Three or four fan,ball,custom made Substrate dome rotation speed 3~30 r.p.m Baking structure Up barrel heating, down radiation heating Heating material Tubular heaters, iodine tungsten lamp Control mode Touch Screen,PLC,Manual and Automatic Temperature 350¡æ Temperature uniformity 350¡æ ¡À 10 ¡æ Evaporation source Resistance evaporation source, electron beam evaporation source. Working environment requirements 1. Environment temperature:10¡«35¡æ 2 .Relative humidity: no more than 80% Equipment power requirements